Books
3 results foundTitle | Authors | Description | OpenBook ID | |
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2001 6th International Symposium on Plasma- and Process-Induced Damage | Manfred Engelhardt | International Symposium on Plasma Process-Induced Damage (6th 2001 Monterey, Calif.) | OL13697262W |
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2000 5th International Symposium on Plasma Process-Induced Damage | Mitsumasa Koyanagi | International Symposium on Plasma Process-Induced Damage (5th 2000 Santa Clara, Calif.) | OL13697264W |
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Gate dielectric integrity | D. C. Gupta | xi, 169 p. : 23 cm | OL19473359W |