Gate dielectric integrity

By D. C. Gupta

Subjects: Gate array circuits, Silicon oxide films, Reliability, Wafer-scale integration, Integrated circuits, Dielectrics, Dielectrics -- Testing, Silicon oxide films -- Testing, Semiconductor wafers, Gate array circuits -- Materials, Integrated circuits -- Wafer-scale integration -- Reliability, Semiconductor wafers -- Reliability, Materials, Testing

Description: xi, 169 p. : 23 cm