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Lithography
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Stefan Landis |
"Lithography is now a complex tool at the heart of a technological process for manufacturing micro and nanocomponents. A multidisciplinary technology, lithography continues to push the limits of opti… |
OL16148866W |
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Alternative Lithography
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Clivia M. Sotomayor Torres |
This book intended for academic and industrial research scientists and engineers, as well as industrial laboratories working on sensors, biotechnology and opto/electronics details in 17 chapters stat… |
OL19825819W |
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Nanoimprint Lithography: An Enabling Process for Nanofabrication
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Weimin Zhou |
Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for ma… |
OL19889913W |
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Fundamental Principles of Optical Lithography
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Chris Mack |
The fabrication of an integrated circuit requires a variety of physical and chemical processes to be performed on a semiconductor substrate. In general, these processes fall into three categories: fi… |
OL9367342W |