Nanoimprint Lithography: An Enabling Process for Nanofabrication

By Weimin Zhou

Subjects: Nanotechnology, Nanoelectronics, Optical materials, Nanotechnology and Microengineering, Nanochemistry, Microlithography, Engineering, Nanostructures, Lithography, Optical and Electronic Materials

Description: Nanoimprint Lithography: An enabling process for nanofabrication presents a comprehensive description of nanotechnology that is one of the most promising low-cost, high-throughput technologies for manufacturing nanostructures, and an emerging lithography candidates for 22, 16 and 11 nm nodes. It provides the exciting, multidisciplinary field, offering a wide range of topics covering: principles, process, material and application. <br>This book would be of specific interest for researchers and graduate students in the field of nanoscience, nanotechnology and nanofabrication, material, physical, chemical, electric engineering and biology. <br>Dr. Weimin Zhou is an associate professor at Shanghai Nanotechnology Promotion Center, China.