Books
2 results found| Title | Authors | Description | OpenBook ID | |
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Ultraclean Surface Processing of Silicon Wafers | Takeshi Hattori | The contamination of wafer surfaces with particles arising from the processing equipment is the main reason for yield losses in the manufacturing of VLSI devices. The starting point for the control o… | OL19908348W |
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Porous silicon for biomedical applications | Hélder A. Santos | Porous silicon is rapidly attracting increasing interest in the biomaterials community. This nanostructured and biodegradable material has a range of properties, making it ideal for drug delivery, ca… | OL23178396W |