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Physical Chemistry of, in and on Silicon
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Gianfranco Cerofolini |
This book reviews the physical and chemical properties of silicon and furnishes an up-to-date collection of data. New phases of silicon are described, a new approach is presented to the group III acc… |
OL19894660W |
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Ultraclean Surface Processing of Silicon Wafers
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Takeshi Hattori |
The contamination of wafer surfaces with particles arising from the processing equipment is the main reason for yield losses in the manufacturing of VLSI devices. The starting point for the control o… |
OL19908348W |
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Porous silicon for biomedical applications
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Hélder A. Santos |
Porous silicon is rapidly attracting increasing interest in the biomaterials community. This nanostructured and biodegradable material has a range of properties, making it ideal for drug delivery, ca… |
OL23178396W |
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Silicon germanium
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Raminderpal Singh,Modest M. Oprysko,David Harame |
"An excellent introduction to the SiGe BiCMOS technology, from the underlying device physics to current applications." -Ron Wilson, EETimes "SiGe technology has demonstrated the ability to provid… |
OL8226027W |