Fundamental principles of engineering nanometrology

By R. K. Leach

Subjects: Nanotechnology, Measurement, Microtechnology, Metrology

Description: Fundamental Principles of Engineering Nanometrology provides a comprehensive overview of engineering metrology and how it relates to micro and nanotechnology (MNT) research and manufacturing. By combining established knowledge with the latest advances from the field, it presents a comprehensive single volume that can be used for professional reference and academic study.